CMP｜FAQ | ACCRETECH - TOKYO SEIMITSU

Please tell us what measures to take when cutting the power supply for a long period (when halting the equipment for around a week, for example, during year-end and New Year's holidays or summer holidays).

Remove the consumables (retainer, dress, brushes) and store in a hydrated state.
Replace the water in the chemical solution line and the polishing agent line.
Drain the water from the equipment.
Turn off the equipment’s power supply.
Cut off all the utilities.
●Contact our customer support for details.

Please tell us what measures to take when starting up power supply after its long-term (after halting the equipment for around a week, for example, during year-end and New Year's holidays or summer holidays).

Turn on all the utilities.
Turn on the equipment’s power supply and confirm that it starts up normally.
Re-install the consumables that were previously removed.
●Contact our customer support for details.

When should we replace the consumables? (Where can we check the information about the replacement period?)

You can check it on the equipment screen. Please refer to the instruction manual.
●Contact our customer support for details.

The equipment does not start up.

Are the exterior covers closed?
Is the UPS up?
●Contact our customer support for details.

The robot transfer position is misaligned.

You need to check the robot teaching and the belt tension.
●We recommend regular inspection. Contact our customer support for details.

Please let us know how to replace parts. (Let us know how to replace consumables.)

Perform the replacement according to the equipment procedure. Please refer to the instruction manual.
●Contact our customer support for details.
We recommend taking the operations training and the maintenance training courses.

The polishing rate has fallen or risen.

Does the polishing pad have a groove?
Check the slurry flow rate.
Check the dress calibration.
Check the head calibration.
●Contact our customer support for details.
We recommend taking the operations training and the maintenance training courses.

A pump error occurs (for an accessory such as SSU, CSU, or simple SSU).

Does the pump usage time exceed the previously specified amount of time?
Are the pump pressure and the damper pressure appropriate?
●Contact our customer support for details.

Please let us know how to obtain the cleaning machine LOG. (With a polishing part side)

Please refer to the instruction manual.
●Contact our customer support for details.
We recommend taking the operations training course.

Please let us know how to make a recipe backup.

Please refer to the instruction manual.
●Contact our customer support for details.
We recommend taking the operations training course.

A driver alarm has occurred.

Where is the target driver?
What driver error code is displayed?
●Contact our customer support for details.

A vacuum source pressure drop alarm has occurred.

Is the vacuum pump functioning properly?
Is the source valve closed?
●Contact our customer support for details.

A head suction error appears.

Does the polishing pad have a groove?
When does the head suction error occur?
●Contact our customer support for details.

An In/Out table wafer loaded error appears.

Are there any water droplets around the sensor?
Has the sensor output dropped?
●Contact our customer support for details.

A wafer inventory error appears in the cleaning machine.

Are there any water droplets around the sensor?
Has the sensor output dropped?
●Contact our customer support for details.