FAQ
CMP
Remove the consumables (retainer, dress, brushes) and store in a hydrated state.
Replace the water in the chemical solution line and the polishing agent line.
Drain the water from the equipment.
Turn off the equipment’s power supply.
Cut off all the utilities.
●Contact our customer support for details.
Turn on all the utilities.
Turn on the equipment’s power supply and confirm that it starts up normally.
Re-install the consumables that were previously removed.
●Contact our customer support for details.
You can check it on the equipment screen. Please refer to the instruction manual.
●Contact our customer support for details.
Are the exterior covers closed?
Is the UPS up?
●Contact our customer support for details.
You need to check the robot teaching and the belt tension.
●We recommend regular inspection. Contact our customer support for details.
Perform the replacement according to the equipment procedure. Please refer to the instruction manual.
●Contact our customer support for details.
We recommend taking the operations training and the maintenance training courses.
Does the polishing pad have a groove?
Check the slurry flow rate.
Check the dress calibration.
Check the head calibration.
●Contact our customer support for details.
We recommend taking the operations training and the maintenance training courses.
Does the pump usage time exceed the previously specified amount of time?
Are the pump pressure and the damper pressure appropriate?
●Contact our customer support for details.
Please refer to the instruction manual.
●Contact our customer support for details.
We recommend taking the operations training course.
Please refer to the instruction manual.
●Contact our customer support for details.
We recommend taking the operations training course.
Where is the target driver?
What driver error code is displayed?
●Contact our customer support for details.
Is the vacuum pump functioning properly?
Is the source valve closed?
●Contact our customer support for details.
Does the polishing pad have a groove?
When does the head suction error occur?
●Contact our customer support for details.
Are there any water droplets around the sensor?
Has the sensor output dropped?
●Contact our customer support for details.
Are there any water droplets around the sensor?
Has the sensor output dropped?
●Contact our customer support for details.