Semiconductor Manufacturing Equipment

FAQ

Dicing Machines

Please tell us what measures to take when cutting the power supply for a long period (when halting the equipment for around a week, for example, during year-end and New Year's holidays or summer holidays).

If the equipment interior becomes extremely dirty, then clean it.
Turn off the equipment’s power supply.
Cut off all utilities other than the air supply. *Do not cut off the air supply (doing so may damage the spindles).
●Contact our customer support for detail

Please tell us what measures to take when starting up power supply after its long-term (after halting the equipment for around a week, for example, during year-end and New Year's holidays or summer holidays).

Turn on all the utilities.
Turn on the equipment’s power supply and confirm that it starts up normally.
●Contact our customer support for details.

A kerf check error occurs.

Does the focus match the kerf?
Are the focus and illumination intensity appropriate?
●Re-register the kerf check image from the kerf check environment registration.
   If normal functioning is still not restored, please contact our customer support.

An alignment error has occurred.

Have you confirmed the alignment (model) image?
●Re-register the alignment or review the spiral range.

It is not possible to detect a stable height with the optical cutter set.

Can the error be removed by performing a retry?
●Check the high air and low air flow rates.
    Adjust the down limit with a new blade and re-adjust the optical position.

A spindle cooling water flow rate error has occurred.

Roughly what is the flow rate?
●Confirm the threshold and clean the flow rate sensor.

A cutting water flow rate error has occurred.

Roughly what is the flow rate?
●Confirm the threshold and clean the flow rate sensor.

The microscope shutter action is defective.

Can you operate it manually from the I/O screen?
●Remove the microscope cover and check the condition of the sensor. 
    Clean around the shutter.

A water leak error has occurred.

What is the location of the water leak?
●Check the condition of the water leak sensor at the location where the error occurs.

A spindle load current value over error has occurred.

Have you cleaned the area surrounding the flange cover?
Is the blade damaged?
●The cutting conditions may be unsatisfactory or sludge may have accumulated at the bases of the spindle shaft and the spindle cap, so remove the flange and clean the area.

A workpiece vacuum error has occurred.

Are there any wrinkles on the tape?
Is there any dirt on the table?
●If there are wrinkles, re-apply the tape so that there are no wrinkles. 
    Clean the table.

A blade mounting error has occurred.

The edge of the flange directly contacts the base part for the blade.

Therefore, if any foreign material is adhered to the edge of the flange, that may cause a blade mounting error, have a negative effect on the processing position, or result in deteriorating processing quality.

Preventive action during replacing a blade, the periodic check of edge accuracy, and edge correction are required.

●During replacing a blade, wipe the edge of the flange with a cotton swab, etc. moistened with alcohol, and prevent any foreign material from getting caught in the blade.

 This can reduce the frequency of the edge correction.

●Immediately check for the edge accuracy of the flange in the following cases;

・ if kerf expansion or the front and back side of chipping are significantly deteriorated.

・ if a deep contact mark on the blade base is found after replacement.

●Check the edge accuracy of the flange periodically, and perform the edge correction.