SURFCOM Map

From sub-nano level surface roughness to milli level profile with 3D.
Tokyo Seimitsu provides non-contact type surface roughness and contour measuring instruments with the confidence born out of many years cultivating know-how of surface roughness measurements.

We provide high performance, easy-to-use systems from highly efficient hybrid types that can measure the surface roughness and the contour in one trace,
to portable types that can be used even on the production site.

[White light interference x focus variation, from sub-nano level surface roughness to milli level profile]
Tokyo Seimitsu has cultivated know-how of surface roughness measurements for many years since developing stylus-type surface roughness measuring instruments in 1962. Based on that know-how and developed as a “contactless surface roughness measuring instrument,” we introduce the “Opt-scope” 3D white light interference microscope which has been introduced and is well-received by numerous customers.
[Product Features]
The “Opt-scope” is a measuring device that can evaluate - to a high precision and high resolution using the white light interference method - 3D shapes such as the nanometer and sub-nanometer level surface roughness of semiconductor wafers, and the static electric chuck that holds that wafer. Furthermore, one “Opt-scope” unit can answer a variety of your measurement needs as we have added the new option, “the focus variation measurement feature,” that enables measurement of shapes at the millimeter level such as gears including steep inclines, which was previously difficult with the white light interference method.

Tokyo Seimitsu's Opt-scope series of non-contacted 3D surface roughness and contour measuring instruments for measuring nano-level surface properties are equipped with the company's original peak detection algorithm DEAP. The newly added model Opt-scope Rex, a large type for special applications, not only provides highly accurate measurement, but also enables evaluation of a wider range of surface properties by extending the drive range of the motorized XY stage to 400 mm square (maximum 600 mm square). It is applicable for the measurement of semiconductors, semiconductor manufacturing equipment parts, molds, etc., where the size of the workpiece tends to be large. This seminar will focus on the new Opt-scope Rex and introduce its measurement principle, comparison with other measurement principles, new functions, and actual application examples.